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Carbon tetrafluoride
| Product name: | Carbon tetrafluoride | ||
| Synonyms | Tetrafluoromethane | ||
| CAS No.: | 75-73-0 | ||
| EINECS | 200-896-5 | ||
| Molecular Formula: | CF4 | ||
| Molecular Weight: | 88.00 | ||
| Physical property: | colorless odorless gas. melting point(ºC): -183.6. Relative density(water=1): 1.61(-130ºC) Boiling point(ºC): -128.0. Saturated vapor pressure (kPa): 13.33(-150.7ºC) Critical temperature(ºC): -45.5. Critical pressure (MPa): 3.74 |
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| Specification: | item | Assay | unit |
| CF4 | ≥99.999 | %V | |
| O2+Ar | ≤1 | ppmv | |
| N2 | ≤4 | ppmv | |
| CO2 | ≤1 | ppmv | |
| CO | ≤1 | ppmv | |
| SF6 | ≤1 | ppmv | |
| Other Halocarbons | ≤1 | ppmv | |
| H2O | ≤1 | ppmv | |
| Acidity(HF) | ≤0.1 | ppmv | |
| Application: | This product can be used in microelectronics industry as plasma etching gas, in producing solar cell, laser technology, gas phase insulation, subzero refrigeration, leakage test agent, and other fields. | ||
| Packing: | steel bottle: 1L; 2L; 4L; 8L; 40L; 47L; Y tank | ||
| Product picture: |  |
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